The full name of MEMS is Micro-Electro-Mechanical System. Micro-electro-mechanical system is a kind of micro-device or system that can be made in batches, which integrates micro-mechanism, micro-sensor, micro-actuator, signal processing and control circuit, even interface, communication and power supply. You can think of it as a technology that uses traditional semiconductor processes and materials, uses micron technology to make micro-machines on a chip, and integrates them with their corresponding circuits as a whole. So it is an advanced manufacturing technology platform developed on the basis of semiconductor manufacturing technology.

 

Advantages: They are smaller in size than traditional machines, the largest of which is no more than a centimeter, or even a few microns, and their thickness is even smaller. Using silicon as the main material, the electrical properties are excellent. The strength, hardness and Young's modulus of silicon material are equivalent to iron, the density is similar to aluminum, and the thermal conductivity is close to molybdenum and tungsten. Adopting the same generation technology as integrated circuit (IC), the mature technology and process in IC production can be utilized in large quantities and low cost production, and the cost performance ratio can be greatly improved compared with the traditional "mechanical" manufacturing technology.

 

 

With the development of electronic technology, the application of MEMS is more and more extensive, from the earliest industrial, aviation applications to the general consumer market.  and  are so-called high-value MEMS applications, but they are too small to be worth about $40 million a year and have limited room for growth. The value of MEMS devices in medical electronics is also good, and the average selling price of its sensors is much higher than that of other comparable MEMS fields. Overall, the annual revenue of the high value MEMS industry will reach about US $300 million. But the most widely used fields are automotive electronics industry and consumer electronics application market, which account for more than 60% of the MEMS sensor market. We will analyze these two main applications.